摘要： 【目的】提高 BK7玻璃的透过率和防雾性能。【方法】在利用 TFCalc光学薄膜设计软件分析厚度对光学性质影响的基础上，采用酸催化溶胶 -凝胶法在 BK7玻璃表面制备了 SiO₂减反射膜。通过 X射线衍射仪（XRD）表征了 SiO₂的相结构，采用扫描电子显微镜（ SEM）和白光干涉仪表征了 SiO2薄膜表面形貌和粗糙度；采用紫外 -可见 -近红外分光光度计测试了 SiO₂薄膜不同入射角（ 0°、15°和 30°）的透过率；通过接触角测试仪测试了 SiO₂薄膜的接触角，记录了接触角随固 -液接触时间的变化，分析了薄膜的润湿性；通过自制防雾测试装置，评价了 SiO₂薄膜的防雾性能。【结果】酸催化溶胶 -凝胶法制备的 SiO₂为非晶相，在 BK7玻璃表面制备的 SiO₂薄膜均匀、无裂纹，与未镀膜玻璃相比，制备 SiO₂薄膜后，表面粗糙度显著增大。不同厚度的 SiO₂薄膜均具有减反射性能，其中，入射角为 0°时，波长在 380~1 100 nm范围内，采用提拉速度 3 cm/min制备的 SiO₂薄膜平均透过率为 93. 39%，高于未镀膜玻璃 1. 62%；当入射角增加到 30°时，镀膜前后 BK7玻璃的透过率均下降，但采用提拉速度 3 cm/min制备的 SiO₂薄膜平均透过率为 90. 89%，比未镀膜玻璃的高 2. 42%。制备 SiO₂薄膜后， BK7玻璃表面由亲水性（水接触角约 47°）转变为超亲水性（水接触角约 3°）。防雾性能测试表明， BK7玻璃表面制备超亲水 SiO₂薄膜后，水蒸气冷凝形成的小液滴能够快速铺展开，具有较好的防雾性能。【结论】在玻璃表面采用酸催化溶胶 -凝胶法制备 SiO₂薄膜，能够实现减反射防雾性能，在光电子器件和光伏设备中具有潜在的应用价值。

关键词: SiO₂薄膜, 溶胶 -凝胶, 酸催化, 光学性质, 防雾

Abstract: ［Objective］In order to improve the optical transmittance and antifogging property of glass.［Methods］On the basis of analyzing the influence of thickness on optical properties by usingTFCalc optical film design software，SiO₂ antireflection films were prepared on BK7 glass by an acid-catalyzed sol-gel method. The structure and surface morphology of the SiO₂ film were characterized by X-ray diffraction（XRD）， scanning electron microscope（SEM） and white light interferometer. The transmittance spectra of SiO₂ films with different incident angles（0°，15°，30°）were tested using a UV-visible-near-infrared spectrophotometer. The contact angle was measured and its variation with solid-liquid contact time was recorded. The wettability of the film was analyzed and the antifogging propertyof SiO₂ film was evaluated through a self-made anti-fog testing device.［Results］The results indicated that SiO₂ prepared by acid catalyzed sol-gel method was amorphous phase. The SiO₂ films prepared on BK7 glass was uniform and crack-free. Compared to uncoated glass，the surface roughness of the SiO₂-coated glass was significantly higher. All the SiO₂ films prepared on BK7 glass had antireflection property. Among them，the average transmittance of SiO₂ film prepared on BK7 glass with the pullingspeed of 3 cm/min was 93. 39% at the wavelength of 380-1 100 nm，which was 1. 62% higher than that of the uncoated glass. When the incident angle increased from 0° to 30°，the transmittances of BK7 glass with and without SiO₂ film were decreased. However，at an incident angle of 30°，the SiO2 film prepared on BK7 glass with the pulling speed of 3 cm/min exhibited an average transmittance of 90. 89%，which was 2. 42% higher than that of the uncoated glass. The water contact angle of BK7 and SiO₂-coated BK7 glass were about 47° and 3°，respectively，indicating that the SiO₂ film had superhydrophilicity. Antifogging tests showed that the SiO₂ film coated on BK7 glass had good antifogging performance.［Conclusion］All the results illustrated the SiO₂ films prepared on glass byacid-catalyzed sol-gel method had both antireflection and antifogging properties.

Key words: SiO₂ thin films, sol-gel, acid-catalyzed, optical property, antifogging

中图分类号: 

• TQ637. 4