摘要： 采用复合靶射频磁控溅射方法制备了 ZnO / TiO₂ 复合薄膜，对薄膜 500 °C 退火处理2 h。利用 XRD 和 AFM 对薄膜的晶体结构和表面微观形貌进行了表征，分析讨论了不同溅射时间下制备的薄膜的亲水性。 结果表明:溅射时间为 120 min 时制备的薄膜经过退火处理后，具有锐钛矿和金红石混晶结构，而且具备最佳的亲水性和光致亲水性。

关键词: 溅射时间, 退火, 亲水性, 光致亲水性

Abstract: The ZnO/TiO₂ composite thin films were deposited on glass by composite target radio frequency magnetron sputtering method, and then annealed at 500 ℃ for 2 h. The crystal structure and susface morphology of the films were characterized by XRD and AFM, and the effects of magnetron sputtering time on the hydrophilic properties of ZnO/TiO₂ films were discussed carefully. The results showed that the ZnO/TiO₂ composite thin films which were prepared at the sputtering time of 120 min and annealing treatment at 500 ℃ for 2 h had the anatase and rutile mixed crystal structure as well as the optimal hydrophilic properties and photoinduced hydrophilicity.

Key words: sputtering time, annealing, hydrophilic property, photo-induced hydrophilicity