摘要： 【目的 /意义】明确磁控溅射涂层表面完整性对其摩擦磨损性能的关键影响，为高性能耐磨减摩涂层的设计提供理论依据。【分析 /评论 /进展】系统综述了表面粗糙度、表面纹理、表面缺陷等形貌特征，以及表面硬度与残余应力等物理性能对涂层摩擦学行为的作用机制。降低表面粗糙度、设计合理的表面微织构、抑制表面缺陷可显著减少涂层摩擦力并提高耐磨性；同时较高的表面硬度与适宜的残余压应力有助于增强涂层的耐磨性与抗疲劳性能。【结论 /展望】磁控溅射涂层虽在表面完整性与摩擦学性能优化方面进展显著，但仍面临多因素耦合、材料结构创新、全工况评估、智能绿色工艺及长效失效机制不足等挑战，未来应聚焦跨尺度建模、新型 /仿生涂层、严苛工况评价、智能绿色制备与寿命预测健康管理。

关键词: 磁控溅射, 涂层, 表面完整性, 摩擦磨损

Abstract: ［Objective/Significance］This review aims to clarify the critical influence of surfaceintegrity of magnetron-sputtered coatings on their friction and wear performance，and to provide atheoretical basis for the design of high-performance wear-resistant and friction-reducing coatings.［Analysis/Discussion/Progress］ This paper systematically reviews the mechanisms by which morphological characteristics（surface roughness，surface texture，and surface defects） and physical properties（surface hardness and residual stress） affect the tribological behavior of the coatings. Reducing surface roughness，designing reasonable surface microtextures，and suppressing surfacedefects can significantly reduce the friction and improve the wear-resistant of the coatings. Meanwhile， higher surface hardness and appropriate compressive residual stress contribute to enhance the wearresistance and fatigue resistance of the coatings.［Conclusion/Prospect］ Although magnetron-sputtered coatings have made significant progress in surface and structural innovation，limited full-condition evaluation，underdeveloped intelligent and green processes，and incomplete understanding of long-term failure mechanisms. Future research should focus on cross-scale modeling，novel/bioinspired coatings，harsh-condition performance evaluation， intelligent and green fabrication，and life prediction and health management. 

Key words: magnetron sputtering, coating, surface integrity, friction and wear

中图分类号: 

• TQ639