Abstract: This article has described the application fields and technical characteristics of high-purity TiO₂ for electronic industry. The main preparation methods of high-purity TiO₂ were reviewed, including sulfate process, TiCl₄ direct hydrolysis, chlorinate process, and hydrolysis of titanium alkoxide. The ppinciple,technological process, process control, product quality, and the comparison of corresponding preparation methods in terms of technology, equipment and cost were described. The sulfate process and TiCl₄ direct hydrolysis have industrialized already because of their simple processes and high quality protect and the chlorination process and hydrolysis of titanium alkoxide are still in lab experiment because of their technical difficulties and strict requirement for equipment material. The industrial application and future research trend of high purity TiO₂ preparation methods were porposed.

Key words: high-purity TiO₂, preparalion method;TiCl₄ hvdrolysis process, chlorination process, hydrolysis of titanium alkoxide process

摘要： 介绍了电子用高纯 TiO₂的使用领域以及技术特点，简述了电子用高纯 TiO₂ 主要制备方法，包括硫酸法、TiCl₄直接水解法、氯化法、钛醇盐水解法；详细阐述了各种制备方法的原理、工艺流程、工艺控制、产品质量；对各种制备方法在工艺、设备、成本等方面进行了对比。硫酸法和 TiCl₄ 直接水解法因具有工艺简单、产品质量好等优点，在国内已实现了工业化。氯化法和钛醇盐水解法因生产技术难度大、设备材质要求苛刻等方面的原因，仍处于实验室研究阶段。并提出了工业应用的建议以及今后研究的方向。

关键词: 高纯 TiO₂, 制备方法, 硫酸法, TiCl₄水解法, 氯化法, 钛醇盐水解法