摘要： 陶瓷涂层因其优异的耐磨、隔热等性能，被应用于各工程领域，但其断裂韧性差、质脆的特点严重限制了其推广应用。为了改善陶瓷涂层质脆的缺陷，研究人员采用了多种方法对其进行增韧改性，文中论述了陶瓷涂层的增韧方法以及对应机制，综述了磁控溅射原理以及调控其工艺参数、掺杂其他元素等方法对陶瓷涂层结构、应力、晶界等的影响。总结了目前陶瓷涂层断裂韧性与硬度不可兼得、增韧机制受涂层尺寸影响等研究难点，并从磁控溅射工艺参数、多种工艺和增韧机制协同增韧等方面对提高陶瓷涂层断裂韧性进行了展望。
关键词:
陶瓷涂层,
磁控溅射,
断裂韧性,
增韧机制
Abstract: Ceramic coating have been used in various engineering fields because of theirexcellent wear resistance and heat insulation properties，but their poor fracture toughness andbrittle quality seriously limit their popularization. In order to improve the brittleness of ceramiccoating，the toughening method and corresponding mechanism of ceramic coating were discussed. The principle of magnetron sputtering and the influence of regulating the processparameters and doping other elements on the structure，stress and grain boundary of ceramiccoating were reviewed. The difficulties in the study of ceramic coating fracture toughness andhardness are summarized，and the toughening mechanism is affected by the size of the coating.The prospects for improving the fracture toughness of ceramic coating are presented from theaspects of the process parameters of magnetron sputtering and the synergies of variousprocesses and toughening mechanisms.
Key words:
ceramic coating,
magnetron sputtering,
fracture toughness,
toughening mechanism
中图分类号:
高正源, 李昱志, 翟帅, 等. 基于磁控溅射改善陶瓷涂层断裂韧性的研究进展[J]. 涂料工业, 2024, 54(8): 76-81.
GAO Z Y, LI Y Z, ZHAI S, et al. Research progress on improving fracture toughness of ceramic coating based on magnetron sputtering[J]. Paint & Coatings Industry, 2024, 54(8): 76-81.